| Heating Method | Convection |
|---|
| Dimension (mm) | Internal | W440 × D390 × H550 |
|---|
| External | W1500 × D2180 × H1900 |
|---|
| Process Chamber Material | SUS304 Polishing |
|---|
| Temperature Control Method | Programmable PID Control |
|---|
| Thermocouple Type | K-Type |
|---|
| Temp Uniformity | Set temp. ±3℃ at 60℃ (Design Temp : 230℃) |
|---|
| Chamber working pressure | 16 kgf/㎠ (Max 22 kgf/㎠) |
|---|
| Pressurizing method | Provided by CDA & Booster |
|---|
| Pressure Control | Increase / Decrease: Valve (segments) control |
|---|
| Heater | Sheath Pin Heater |
|---|
| Air circulating method | Sirocco Fan + Motor |
|---|
| Motor Shaft Sealing | Magnetic Driver Seal |
|---|
IR-DPC-600
Purpose
User may perform two different tests to maximize testing efficiency.Specification