| Heating Method | Convection |
Dimension
(mm) | Internal | W440 × D390 × H550 |
| External | W1500 × D2180 × H1900 |
| Process Chamber Material | SUS304 Polishing |
| Temperature Control Method | Programmable PID Control |
| Thermocouple Type | K-Type |
| Temp Uniformity | Set temp. ±3℃ at 60℃ (Design Temp : 230℃) |
| Chamber working pressure | 16 kgf/㎠ (Max 22 kgf/㎠) |
| Pressurizing method | Provided by CDA & Booster |
| Pressure Control | Increase / Decrease: Valve (segments) control |
| Heater | Sheath Pin Heater |
| Air circulating method | Sirocco Fan + Motor |
| Motor Shaft Sealing | Magnetic Driver Seal |
IR-DPC-600
Purpose
Simultaneous testing of multiple processes is possible.A large number of tests can be conducted at once.
Specification
(mm)