| Heating Method | Convection |
Dimension
(mm) | Internal | W560 × D650 × H405 |
| External | W1400 × D2060 × H1590 |
| Process Chamber Material | SUS304 Polishing |
| Temperature Control Method | Programmable PID Control |
| Thermocouple Type | K-Type |
| Temp Uniformity | Set temp. ±3℃ at 60℃ (Design Temp : 230℃) |
| Chamber Working Pressure | 16 kgf/㎠ (Max 22 kgf/㎠) |
| Pressurizing Method | Provided by CDA & Booster |
| Pressure Control | Increase / Decrease: Valve (segments) control |
| Heater | Sheatd Pin Heater |
| Air Circulation | Sirocco Fan + Motor |
Motor Shaft Sealing | Magnetic Driver Seal |
IR-PC-700
Purpose
for Semiconductor IndustrySpecification
(mm)