| Volume | 1573L |
| Temperature | Range | R.T~200℃(5℃/min) |
| Motor | 3HP 1set with Magnet Drive |
| Heat-up Time | 150℃ within 30min |
| Accuracy | ±5% at 200℃ |
| Uniformity | ±5% at 200℃ |
| Controller | Digital PID Controller with Touch Panel |
| Vacuum Pump | Oil Rotary Vacuum Pump 2.1kW Oil Rotary Pump 1,600L/min 1.5kW Booster Pump 10,000L/min |
| Cold Trap 2 set | Range | Down to -70℃ |
| Volume | 20L |
| Inner Size | 400Ø 500L with SUS304, NW50 in/out |
| Outer Size | 760W x 880D x 1400H (mm), 2 set |
| Power | 2 set: 220V 3P 8kW or 380V 3P 8kW |
| Vacuum & Vent | Range | 5 x 102 |
| Time | 5 x 102 within 10 min |
| Leak Rate | Less than 0.03 torr/30min |
| Vacuum | ISO 100 with NW-50 |
| Vent | N2 Vent 1/2" Air Vent 1/2" |
| Material | Chamber | Stainless Steel 304 |
| Body | Steel, 1.6t, Powder Coating |
| Sensor | K-type |
| Insulation | Ceramic Wool |
| Heater | Heating Type | SUS Sheath Heater |
| Heating Method | Air-convection |
| Size (W x D x H, mm) | Internal | 1100 x 1300 x 1100 |
| External | 2000 x 2000 x 2000 |
| Power | 380V 3P 60Hz 50kW 100A |
VFO-1573S
Purpose
Feature
Heat-Exchanger, Gas-Purging system, Water Flow Switch, Auto Exhaust Valve, and other useful functions make this chamber safe and excellent in operation and reliability.
Specification
Vacuum Range Options
0^-3 Torr or higher is also available.