 | | IVO-2000S
Purpose - Vacuum oven for semiconductor cleaning
|
Feature
- 8-channel precise temperature control (includes individual shelf control functionality)
- Automatic VENT function after vacuum maintenance setting
- Includes manual valves for nitrogen gas and air supply
|
Specification
| Model | VO-2000S |
| Chamber Volume | 2000L |
| Heater Power (kW) | 34kW |
| Temperature | Range | 40~400℃ |
| Control | 0.1℃ |
| Accuracy | ±2℃ at 100℃ |
| Sensor | K-type |
| Stability | ±1.0℃ |
| Heat up Time | 5℃ per 30 mins (empty) |
| Vacuum | Range | 0~760 Torr Digital type |
| Degree | About 0.1 Torr |
| Material | Interior | Stainless Steel |
| Exterior | Steel, 1.2t, double painted & baked |
| Heater | SUS Pipe Heater |
| Heating Method | SUS Sheath Heater |
| Shelf | 2 |
Dimension
(W x D x H, mm) | Internal | 1000 x 2000 x 1000 |
| External | 1680 x 2310 x 1800 |
| Power | 380V / 3P/ 60Hz |
| Weight (kg) | About 500kg |
*Vacuum Range Options: 10^-3Torr or higher is also available.
IVO-2000S
Purpose
Feature
Specification
(W x D x H, mm)
*Vacuum Range Options: 10^-3Torr or higher is also available.