Large-Type Vacuum Oven

VO-16000S

Purpose

Removing moisture and impurities during the manufacturing of components or elements required for displays, semiconductors, and secondary batteries.

Feature

PID Auto-tuning controller
Automatically adjusts PID values according to the surrounding environment for precise temperature control. Digital LED or LCD (Option).
Vacuum Oven for Manufacturing High-generation G8.5 TFT-LCD components, OLED components, semiconductor parts, and special parts for film anodizing processes.
Equipment for manufacturing components or elements required for displays, semiconductors, and secondary batteries.
The purpose is to remove moisture and impurities contained in the components.
Guarantees the stability of large equipment and maintains vacuum integrity.
Independent control for each part is possible.

Specification

Model		VO-16000S
Chamber Volume (ℓ)		16000L
Temperature	Range	60~150℃ (Max 120C)
	Heat-up time	120℃ within 60 min
	Controller	Digital PID Control
Vacuum	Gauge	Digital Vacuum Gauge
	Reach Time	~ 5 x 10^4 torr within 20 min at empty ~ 1 x 10^4 torr within 50 min at empty (There may be a difference from the actual result.)
	Dry Pump	· Nominal/Operation Capacity: 3,517/3,000 m2/hr · Ultimate/Operation Pressure: 0.0005/0.001Torr · Booster : 380V 3P, 7.5kw · Pump: 380V 3P, 18.5kw · Booster Inverter Control / Discharger Silencer · Noise Level : 82dB · Chiller 10~15HP included
Material	Chamber	Stainless Steel 304
	Body	Steel, 1.2t, Powder Coating
	Sensor	K-Type
	Insulation	Ceramic Wool
	Door Gasket	Heat-Resistant Silicone (O-Ring Type)
	Door Cooling	Will be operated by Chiller or more
	Viewing Window	Temperature Safety Glass, 12t
	Heater	100 kw
Cart		Needs to be mutually-confirmed with detailed design. (Product Size: 3000 x 3500 x 45mm, 1Ton) With a cart, total weight: Max 2 Ton
Size (W x D x H, mm)	Internal	4000 x 4500 x 1000
Size (W x D x H, mm)	External	4600 x 5100 x 1500 (External dimension may change upon design)
Power		380V 3P, 150kW, 300A, 50/60Hz